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A time-varying Q-filter design for iterative learning control with application to an ultra-precision dual-stage actuated wafer stage.

, , , , and . J. Syst. Control. Eng., 228 (9): 658-667 (2014)

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Data-Based Switching Feedforward Control for Repeating and Varying Tasks: With Application to an Ultraprecision Wafer Stage., , , , and . IEEE Trans. Ind. Electron., 66 (11): 8670-8680 (2019)A time-varying Q-filter design for iterative learning control with application to an ultra-precision dual-stage actuated wafer stage., , , , and . J. Syst. Control. Eng., 228 (9): 658-667 (2014)Time optimal control of triple integrator with input saturation and full state constraints., , , and . Autom., (2020)Local asymmetrical corner trajectory smoothing with bidirectional planning and adjusting algorithm for CNC machining., , , , and . Robotics Comput. Integr. Manuf., (2021)GRU-Type LARC Strategy for Precision Motion Control With Accurate Tracking Error Prediction., , , and . IEEE Trans. Ind. Electron., 68 (1): 812-820 (2021)Model-Data Driven Learning Adaptive Robust Control of Precision Mechatronic Motion Systems With Comparative Experiments., , , , and . IEEE Access, (2018)Selective Detection of Mixtures via a Single Nonselective Sensor - Making the Unworkable Sensor Workable by Machine Learning., , , , , and . Adv. Intell. Syst., (January 2023)High-Accuracy Oriented CILC Motion Control of Mechatronic Systems with Comparative Experiments., , , and . AIM, page 1309-1314. IEEE, (2022)High-performance motion control of an XY stage for complicated contours with BFC trajectory planning., , , and . ICIA, page 1473-1478. IEEE, (2016)Chattering Phenomena in Time-Optimal Control for High-Order Chain-of-Integrators Systems with Full State Constraints., , , , , and . CoRR, (2024)