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A -131-dBc/Hz, 20-MHz MEMS oscillator with a 6.9-mW, 69-kΩ, gain-tunable CMOS TIA., , , and . ESSCIRC, page 249-252. IEEE, (2012)High Quality Factor Mode Ordered Dual Foucault Pendulum Gyroscope., , , , , , , , and . IEEE SENSORS, page 1-4. IEEE, (2018)An integrated controller for tunnel sensors., , , , , , and . IEEE J. Solid State Circuits, 34 (8): 1099-1107 (1999)Crystallographic effects in modeling fundamental behavior of MEMS silicon resonators., , , , and . Microelectron. J., 44 (7): 586-591 (2013)Direct measurements of anchor damping in MEMS resonators., , , , , , , and . IEEE SENSORS, page 1-3. IEEE, (2017)A Dual-Axis Resonant Accelerometer Based on Electrostatic Stiffness Modulation in Epi-Seal Process., , , , , and . IEEE SENSORS, page 1-4. IEEE, (2019)Mass-loaded cantilevers with suppressed higher-order modes for magnetic resonance force microscopy, , , , , and . TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003, 2, page 1120--1123. IEEE, (2003)Autonomous calibration of MEMS disk resonating gyroscope for improved sensor performance., , , , , , , and . ACC, page 5803-5810. IEEE, (2016)Mode-matched MEMS Coriolis vibratory gyroscopes: Myth or reality?, , , , , , and . PLANS, page 1-4. IEEE, (2016)