%0 Journal Article %1 journals/mj/MukhiyaBBLZ11 %A Mukhiya, Ravindra %A Bagolini, Alvise %A Bhattacharyya, T. K. %A Lorenzelli, Leandro %A Zen, M. %D 2011 %J Microelectron. J. %K dblp %N 1 %P 127-134 %T Experimental study and analysis of corner compensation structures for CMOS compatible bulk micromachining using 25 wt% TMAH. %U http://dblp.uni-trier.de/db/journals/mj/mj42.html#MukhiyaBBLZ11 %V 42

@article{journals/mj/MukhiyaBBLZ11, added-at = {2021-08-27T00:00:00.000+0200}, author = {Mukhiya, Ravindra and Bagolini, Alvise and Bhattacharyya, T. K. and Lorenzelli, Leandro and Zen, M.}, biburl = {https://www.bibsonomy.org/bibtex/22e8cd2ff0aaadd2d4838732209be5b56/dblp}, ee = {https://doi.org/10.1016/j.mejo.2010.08.018}, interhash = {1ccbcaffbb2bc991ce5cdd9ce999f803}, intrahash = {2e8cd2ff0aaadd2d4838732209be5b56}, journal = {Microelectron. J.}, keywords = {dblp}, number = 1, pages = {127-134}, timestamp = {2024-04-08T21:36:10.000+0200}, title = {Experimental study and analysis of corner compensation structures for CMOS compatible bulk micromachining using 25 wt% TMAH.}, url = {http://dblp.uni-trier.de/db/journals/mj/mj42.html#MukhiyaBBLZ11}, volume = 42, year = 2011 }