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Experimental study and analysis of corner compensation structures for CMOS compatible bulk micromachining using 25 wt% TMAH.

, , , , and . Microelectron. J., 42 (1): 127-134 (2011)

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Atomic and Molecular Beam Methods. Oxford University Press, (1988)Experimental study and analysis of corner compensation structures for CMOS compatible bulk micromachining using 25 wt% TMAH., , , , and . Microelectron. J., 42 (1): 127-134 (2011)Stress and resistivity analysis of electrodeposited gold films for MEMS application., , , and . Microelectron. J., 37 (11): 1329-1334 (2006)Microstructures etched in doped TMAH solutions, , , , , , , and . Microelectronic Engineering, 53 (1-4): 547--551 (June 2000)A glucose biosensor employing a stable artificial peroxidase based on ruthenium purple anchored cinder., , and . Anal Chem, 75 (11): 2703--2709 (June 2003)Isolated Handwritten Balinese Character Recognition from Palm Leaf Manuscripts with Residual Convolutional Neural Networks., , , and . KSE, page 224-229. IEEE, (2020)Prediction Framework for Potential Tuna Fish Zone in Indonesia., , and . APIT, page 51-55. ACM, (2019)Microbiological Water Quality Test Results Extraction from Mobile Photographs., , , , , , and . iiWAS, page 492-501. ACM, (2019)An integrated system architecture in managing fishery data in Indonesia., , , , and . DICTAP, page 101-108. IEEE, (2014)Building Extraction from Google Earth Images., , , , , and . iiWAS, page 502-511. ACM, (2019)