High-throughput electron beam direct writing of VIA layers by character projection using character sets based on one-dimensional VIA arrays with area-efficient stencil design.
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%0 Conference Paper
%1 conf/aspdac/IkenoMIKIA13
%A Ikeno, Rimon
%A Maruyama, Takashi
%A Iizuka, Tetsuya
%A Komatsu, Satoshi
%A Ikeda, Makoto
%A Asada, Kunihiro
%B ASP-DAC
%D 2013
%I IEEE
%K dblp
%P 255-260
%T High-throughput electron beam direct writing of VIA layers by character projection using character sets based on one-dimensional VIA arrays with area-efficient stencil design.
%U http://dblp.uni-trier.de/db/conf/aspdac/aspdac2013.html#IkenoMIKIA13
%@ 978-1-4673-3029-9
@inproceedings{conf/aspdac/IkenoMIKIA13,
added-at = {2017-05-26T00:00:00.000+0200},
author = {Ikeno, Rimon and Maruyama, Takashi and Iizuka, Tetsuya and Komatsu, Satoshi and Ikeda, Makoto and Asada, Kunihiro},
biburl = {https://www.bibsonomy.org/bibtex/2cbc107b63edd890f8a5d12a0f5cd042f/dblp},
booktitle = {ASP-DAC},
crossref = {conf/aspdac/2013},
ee = {https://doi.org/10.1109/ASPDAC.2013.6509605},
interhash = {7e985da186f3405ef98fbb25a6b06cfe},
intrahash = {cbc107b63edd890f8a5d12a0f5cd042f},
isbn = {978-1-4673-3029-9},
keywords = {dblp},
pages = {255-260},
publisher = {IEEE},
timestamp = {2019-10-17T16:44:50.000+0200},
title = {High-throughput electron beam direct writing of VIA layers by character projection using character sets based on one-dimensional VIA arrays with area-efficient stencil design.},
url = {http://dblp.uni-trier.de/db/conf/aspdac/aspdac2013.html#IkenoMIKIA13},
year = 2013
}
