Article,
Cu pumping in TSVs: Effect of pre-CMP thermal budget.
I. Wolf, K. Croes, O. Pedreira, R. Labie, A. Redolfi, M. Peer, K. Vanstreels, C. Okoro, B. Vandevelde, and E. Beyne.Microelectron. Reliab., 51 (9-11): 1856-1859 (2011)
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- 2011
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- Microelectron. Reliab.
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- 9-11
- pages
- 1856-1859
- volume
- 51
- ee
- https://doi.org/10.1016/j.microrel.2011.06.003
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%1 journals/mr/WolfCPLRPVOVB11
%A Wolf, Ingrid De
%A Croes, Kris
%A Pedreira, O. Varela
%A Labie, Riet
%A Redolfi, Augusto
%A Peer, M. Van De
%A Vanstreels, Kris
%A Okoro, C.
%A Vandevelde, Bart
%A Beyne, Eric
%D 2011
%J Microelectron. Reliab.
%K dblp
%N 9-11
%P 1856-1859
%T Cu pumping in TSVs: Effect of pre-CMP thermal budget.
%U http://dblp.uni-trier.de/db/journals/mr/mr51.html#WolfCPLRPVOVB11
%V 51
@article{journals/mr/WolfCPLRPVOVB11,
added-at = {2023-05-01T00:00:00.000+0200},
author = {Wolf, Ingrid De and Croes, Kris and Pedreira, O. Varela and Labie, Riet and Redolfi, Augusto and Peer, M. Van De and Vanstreels, Kris and Okoro, C. and Vandevelde, Bart and Beyne, Eric},
biburl = {https://www.bibsonomy.org/bibtex/21cff7e41a1a227392bffbc191638aefd/dblp},
ee = {https://doi.org/10.1016/j.microrel.2011.06.003},
interhash = {adc6278ab6d4c6d9c646903d04cc35df},
intrahash = {1cff7e41a1a227392bffbc191638aefd},
journal = {Microelectron. Reliab.},
keywords = {dblp},
number = {9-11},
pages = {1856-1859},
timestamp = {2024-04-09T02:49:13.000+0200},
title = {Cu pumping in TSVs: Effect of pre-CMP thermal budget.},
url = {http://dblp.uni-trier.de/db/journals/mr/mr51.html#WolfCPLRPVOVB11},
volume = 51,
year = 2011
}