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FPGA-Based Decentralized Control of Arrayed MEMS for Microrobotic Application.

, , , , and . IEEE Trans. Ind. Electron., 54 (4): 1926-1936 (2007)

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In-Plane SOI MEMS as a Mechanical Material for Time and Frequency Studies on Vibration., , and . EWME, page 101-105. IEEE, (2018)An Intelligent Action Control System Based on Extended Vector Annotated Logic Program and its Hardware Implementation., , and . Intell. Autom. Soft Comput., 13 (3): 289-304 (2007)Special Section on Microelectronic Test Structures (ICMTS2007).. IEICE Trans. Electron., 91-C (8): 1313-1314 (2008)FPGA-Based Decentralized Control of Arrayed MEMS for Microrobotic Application., , , , and . IEEE Trans. Ind. Electron., 54 (4): 1926-1936 (2007)7.5Vmax arbitrary waveform generator with 65nm standard CMOS under 1.2V supply voltage., , , and . CICC, page 1-4. IEEE, (2012)"MEMS de Piano"- an experimental course of design, fabrication, and testing of MEMS oscillator., , , , and . EWME, page 171-176. IEEE, (2014)One week TAT of 0.8μm CMOS gate array with analog elements for educational exercise., , , and . EWME, page 1-3. IEEE, (2016)Conveyor for Pneumatic Two-Dimensional Manipulation Realized by Arrayed MEMS and its Control., , , , , , and . J. Robotics Mechatronics, 16 (2): 163-170 (2004)A facile coplanar reverse electrowetting-on-dielectric configuration for more flexible and integratable force/motion sensing applications., , , , and . IEEE SENSORS, page 1-5. IEEE, (2022)Empowering CMOS-VLSI by MEMS Technology - An Example of High-Voltage Photovoltaic Chiplet Integration for Autonomous Micro Robotic Systems.. ICICDT, page xxxvii. IEEE, (2023)