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Tracking of spiral trajectories beyond scanner resonance frequency by a MEMS nanopositioner.

, , , and . CCA, page 1014-1019. IEEE, (2015)

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Signal Transformation Approach to Tracking Control With Arbitrary References., and . IEEE Trans. Autom. Control., 57 (9): 2294-2307 (2012)A Micro-Robotic Approach for The Correction of Angular Deviations in AFM Samples From Generic Topographic Data., , , and . IROS, page 1055-1061. IEEE, (2022)A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control., , and . IEEE Trans. Control. Syst. Technol., 23 (2): 504-512 (2015)Tracking of spiral trajectories beyond scanner resonance frequency by a MEMS nanopositioner., , , and . CCA, page 1014-1019. IEEE, (2015)Control of a high-speed nanopositioner for Lissajous-scan video-rate AFM., , and . AuCC, page 171-176. IEEE, (2013)Tracking of constant-linear-velocity spiral trajectories by approximate internal model control., , and . CCTA, page 129-134. IEEE, (2017)In-Situ Semiconductor Position Sensor for Differentially Piezo-Driven Nanopositioners., , , , and . IEEE SENSORS, page 1-4. IEEE, (2019)Stability of signal transformation method for triangular waveform tracking., , and . CDC, page 2402-2407. IEEE, (2010)Force Transmission Through a Structurally Flexible Beam: Dynamic Modeling and Feedback Control., and . IEEE Trans. Contr. Sys. Techn., 17 (6): 1245-1256 (2009)Prestiction Friction Modeling and Position Control in an Actuated Rotary Arm., and . IEEE Trans. Instrumentation and Measurement, 59 (1): 131-139 (2010)