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Tracking of spiral trajectories beyond scanner resonance frequency by a MEMS nanopositioner.

, , , and . CCA, page 1014-1019. IEEE, (2015)

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Characterization and Control of a Piezoelectrically Actuated High-speed Planar Nanopositioner*., , , and . CCTA, page 1313-1318. IEEE, (2022)$Q$ Control of an Active AFM Cantilever With Differential Sensing Configuration., , , , and . IEEE Trans. Contr. Sys. Techn., 27 (5): 2271-2278 (2019)Characterization of piezoresistive and electrothermal sensors in MEMS devices., and . IEEE SENSORS, page 1-3. IEEE, (2016)On-chip atomic force microscopy: Mechatronic system design and control., , , and . ACC, page 3093. IEEE, (2016)On the Convergence of Blockchain and Internet of Things (IoT) Technologies., , and . CoRR, (2019)Internal Model Control for Spiral Trajectory Tracking With MEMS AFM Scanners., , , and . IEEE Trans. Control. Syst. Technol., 24 (5): 1717-1728 (2016)Sequential Cycloid Scanning for Time-resolved Atomic Force Microscopy., , , and . AIM, page 125-130. IEEE, (2018)Design and control of a single-chip SOI-MEMS atomic force microscope., , , and . ACC, page 2869-2874. IEEE, (2017)Iterative Learning Control for High-Speed Rosette Trajectory Tracking., , and . CDC, page 6832-6837. IEEE, (2019)Noise resilient 2-DoF washout tracking controller for nanopositioning systems subject to sensor drift., , and . ACC, page 1199-1204. IEEE, (2015)