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Comparative study on the properties of amorphous carbon layers deposited from 1-hexene and propylene for dry etch hard mask application in semiconductor device manufacturing

, , , , , , и . Thin Solid Films, 519 (20): 6683 - 6687 (2011)10th Asia-Pacific Conference on Plasma Science and Technology.
DOI: http://dx.doi.org/10.1016/j.tsf.2011.04.077

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Cheol-Woong Byun

Youngjin Byun

Sangwon Byun

Woo-Hyuk Byun

Tae-Gang Byun

 

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