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Micro-/Nano-Integration for MEMS based on nano-robotic assembly.

, , and . ISR/ROBOTIK, page 1-8. VDE Verlag, (2010)

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Development of a Force Microsensor for Robot-based Nanohandling., , , and . SyRoCo, volume 42 of IFAC Proceedings Volumes, page 609-614. International Federation of Automatic Control, (2009)Approach for the 3D-Alignment in Micro- and Nano-scale Assembly Processes., , , and . IPAS, volume 315 of IFIP Advances in Information and Communication Technology, page 167-173. Springer, (2010)Development of Micro-force Sensors for Testing Applications in Micro- and Nanorobotics., , , and . ISR/ROBOTIK, page 1-6. VDE Verlag, (2010)Micro-/Nano-Integration for MEMS based on nano-robotic assembly., , and . ISR/ROBOTIK, page 1-8. VDE Verlag, (2010)