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Micro-/Nano-Integration for MEMS based on nano-robotic assembly.

, , and . ISR/ROBOTIK, page 1-8. VDE Verlag, (2010)

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Nanorobotic transfer and characterization of graphene flakes., , and . IROS, page 640-645. IEEE, (2012)Control system for motion control of a piezoelectric micromanipulation robot., and . Adv. Robotics, 13 (6): 577-589 (1998)A Novel Force Sensor Based on Optical Fibers Used for Semicircular Flexure Beam Unit., , , , and . IEEE Trans. Instrum. Meas., (2022)Nanorobotic Testing to Assess the Stiffness Properties of Nanopaper., , , , and . IEEE Trans. Robotics, 30 (1): 115-119 (2014)Computer Aided Planning System of a Flexible Microrobot-Based Microassembly Station., , and . EUROCAST, volume 1798 of Lecture Notes in Computer Science, page 414-434. Springer, (1999)Robotic nanowire handling for prototypic NEMS devices., and . ICRA, page 1421-1426. IEEE, (2013)Intelligent robot hand control system using a tailorable parallel computer concept., , and . IROS, page 216-223. IEEE, (1994)Nanorobot-Based Handling and Transfer of Individual Silicon Nanowires., and . Int. J. Intell. Mechatronics Robotics, 2 (2): 34-46 (2012)FPGA-Based Object Detection and Motion Tracking in Micro- and Nanorobotics., and . Int. J. Intell. Mechatronics Robotics, 3 (1): 27-37 (2013)Control system for the automatic handling of biological cells with mobile microrobots., , and . ACC, page 3986-3991. IEEE, (2004)