Author of the publication

Modeling of a plasma processing machine for semiconductor wafer etching using energy-functions-based neural networks.

, , , , and . IEEE Trans. Contr. Sys. Techn., 5 (6): 598-613 (1997)

Please choose a person to relate this publication to

To differ between persons with the same name, the academic degree and the title of an important publication will be displayed. You can also use the button next to the name to display some publications already assigned to the person.

 

Other publications of authors with the same name

Three-Dimensional Simulations of Plasmas Using MPPs., , , and . PPSC, page 201-206. SIAM, (1995)$\alpha$-Ga2O3/Diamond Heterojunction PN Diode: Device Fabrication and TCAD Modelling., , and . DRC, page 1-2. IEEE, (2023)Small-signal analysis of MESFET including the energy conservation equation., and . IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 10 (12): 1530-1533 (1991)Using neural networks to control the process of plasma etching and deposition., , , , and . ICNN, page 1091-1096. IEEE, (1996)Toward Diamond-Collector Heterojunction Bipolar Transistors via grafted GaAs-Diamond n-p junction., , , , , , , , , and 6 other author(s). BCICTS, page 1-4. IEEE, (2019)Modeling of a plasma processing machine for semiconductor wafer etching using energy-functions-based neural networks., , , , and . IEEE Trans. Contr. Sys. Techn., 5 (6): 598-613 (1997)A Monolithic Wilkinson Power Divider on Diamond via a Combination of Additive Manufacturing and Thin-Film Process., , , , , , , , and . RWS, page 201-204. IEEE, (2020)Diamond Metal-Semiconductor Field Effect Transistor for High Temperature Applications., , , , , and . DRC, page 155-156. IEEE, (2019)