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A study on process-compatibility in CMOS-first MEMS-last integration., , , , , , и . CICC, стр. 85-88. IEEE, (2008)FPGA-Based Decentralized Control of Arrayed MEMS for Microrobotic Application., , , , и . IEEE Trans. Ind. Electron., 54 (4): 1926-1936 (2007)Contact Less Radio-frequencies Biosensor for Biological Parameters Analysis., , , , и . BIODEVICES, стр. 398-401. INSTICC Press, (2009)Sparse Random Signals for Fast Convergence on Invertible Logic., , , , , , и . IEEE Access, (2021)A Design Framework for Invertible Logic., , , , , , , и . IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 40 (4): 655-665 (2021)A MEMS-based interactive laser scanning display with a collocated laser range finder., , и . IEICE Electron. Express, 12 (10): 20150072 (2015)Biomotor-based nanotransport system constructed by pick-and-place assembly of individual molecules., , , , и . IROS, стр. 5628-5633. IEEE, (2010)An Integrated Micro Servosystem., , и . IROS, стр. 15-20. IEEE, (1988)Servo Controller For Electrostatic Micro-actuators., , , и . IROS, стр. 21-26. IEEE, (1988)Two-dimensional conveyance system using cooperative motions of many microactuators., и . IROS, стр. 988-992. IEEE, (1996)