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A feasibility study of AlN ultrasonic transducers fabrication using the multi-user PiezoMUMPs process for fingerprint scanning at GHz range., , , and . PRIME, page 293-296. IEEE, (2019)Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors., , , , and . Sensors, 16 (10): 1690 (2016)CMOS Cantilever-based Oscillator for Attogram Mass Sensing., , , , , , , and . ISCAS, page 3319-3322. IEEE, (2007)Nanomechanical mass sensor for monitoring deposition rates through confined apertures., , , , , , , , and . NEMS, page 94-97. IEEE Computer Society, (2009)Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging Applications., , , and . IEEE Access, (2020)Design of self-sustained CMOS amplifiers for all-CMOS MEMS based oscillators., , , , and . ICECS, page 752-755. IEEE, (2016)CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology., , and . Micromachines, 7 (2): 30 (2016)CMOS integrated MEMS resonator for RF applications., , , , , , , , and . ISCAS, IEEE, (2006)Mixing in a 220MHz CMOS-MEMS., , , , , , , , and . ISCAS, page 2630-2633. IEEE, (2007)Analysis of Mutually Injection-Locked Oscillators for Differential Resonant Sensing., , and . IEEE Trans. Circuits Syst. I Regul. Pap., 63-I (7): 1055-1066 (2016)