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A Temperature-to-Digital Converter for a MEMS-Based Programmable Oscillator With < ±0.5-ppm Frequency Stability and < 1-ps Integrated Jitter., , , , , , , , , and 3 other author(s). IEEE J. Solid State Circuits, 48 (1): 276-291 (2013)Session 22 overview: Sensors & displays., and . ISSCC, page 378-379. IEEE, (2013)A temperature-to-digital converter for a MEMS-based programmable oscillator with better than ±0.5ppm frequency stability., , , , , , , , , and 3 other author(s). ISSCC, page 206-208. IEEE, (2012)Silicon MEMS Oscillators for High-Speed Digital Systems., and . IEEE Micro, 30 (2): 80-89 (2010)F5: Frequency generation and clock distribution., , , , , , , and . ISSCC, page 508-509. IEEE, (2013)Silicon MEMS oscillators for high speed digital systems., and . Hot Chips Symposium, page 1-25. IEEE, (2009)11.1 Dual-MEMS-resonator temperature-to-digital converter with 40 K resolution and FOM of 0.12pJK2., , , , , , , , , and 4 other author(s). ISSCC, page 200-201. IEEE, (2016)12.9 A 1.55×0.85mm2 3ppm 1.0μA 32.768kHz MEMS-based oscillator., , , , , , , , , and 6 other author(s). ISSCC, page 226-227. IEEE, (2014)A MEMS-Assisted Temperature Sensor With 20-µK Resolution, Conversion Rate of 200 S/s, and FOM of 0.04 pJK2., , , , , , , , , and 5 other author(s). IEEE J. Solid State Circuits, 52 (1): 185-197 (2017)A 3 ppm 1.5 × 0.8 mm 2 1.0 µA 32.768 kHz MEMS-Based Oscillator., , , , , , , , , and 7 other author(s). IEEE J. Solid State Circuits, 50 (1): 291-302 (2015)