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Quasi-Static Displacement Self-Sensing Measurement for a 2-DOF Piezoelectric Cantilevered Actuator.

, , , , and . IEEE Trans. Ind. Electron., 64 (8): 6330-6337 (2017)

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Modelling and H∞ force control of a nonlinear piezoelectric cantilever., , and . IROS, page 3131-3136. IEEE, (2007)Hysteresis and vibration compensation in a nonlinear unimorph piezocantilever., , and . IROS, page 558-563. IEEE, (2008)An Overview of Piezoelectric Self-Sensing Actuation for Nanopositioning Applications: Electrical Circuits, Displacement, and Force Estimation., , , and . IEEE Trans. Instrumentation and Measurement, 69 (1): 2-14 (2020)Automation of assembly and packaging at the micro/nano-scale., , , and . CASE, page 1-5. IEEE, (2011)Modelling and Robust Position/Force Control of a Piezoelectric Microgripper., , and . CASE, page 39-44. IEEE, (2007)Presentation and improvement of an AFM-based system for the measurement of adhesion forces., and . CASE, page 585-590. IEEE, (2009)Development and Dynamic Modeling of a New Hybrid Thermopiezoelectric Microactuator., and . IEEE Trans. Robotics, 26 (6): 1077-1085 (2010)A Robust Resonant Controller for High-Speed Scanning of Nanopositioners: Design and Implementation., , , , and . IEEE Trans. Control. Syst. Technol., 28 (3): 1116-1123 (2020)Enhancement of micro-positioning accuracy of a Piezoelectric positioner by suppressing the rate-dependant hysteresis nonlinearities., , and . AIM, page 1683-1688. IEEE, (2014)Robust control for a class of interval model: Application to the force control of piezoelectric cantilevers., , and . CDC, page 4257-4262. IEEE, (2010)