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Reliability of TSV interconnects: Electromigration, thermal cycling, and impact on above metal level dielectric.

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Stress management strategy to limit die curvature during silicon interposer integration., , , , , , , , , and 1 other author(s). 3DIC, page TS11.4.1-TS11.4.7. IEEE, (2015)Friction Reduction through Ultrasonic Vibration Part 2: Experimental Evaluation of Intermittent Contact and Squeeze Film Levitation., , , , , and . IEEE Trans. Haptics, 10 (2): 208-216 (2017)Development of Embedded Three-Dimensional 35-nF/mm2 MIM Capacitor and BiCMOS Circuits Characterization., , , , , , and . IEEE J. Solid State Circuits, 42 (9): 1842-1850 (2007)Psychophysical Power Optimization of Friction Modulation for Tactile Interfaces., , , , , and . EuroHaptics (2), volume 9775 of Lecture Notes in Computer Science, page 354-362. Springer, (2016)200°C direct bonding copper interconnects : Electrical results and reliability., , , , , and . 3DIC, page 1-4. IEEE, (2011)Experimental evaluation of friction reduction in ultrasonic devices., , , , , and . World Haptics, page 37-42. IEEE, (2015)Reliability of TSV interconnects: Electromigration, thermal cycling, and impact on above metal level dielectric., , , , , , , , , and . Microelectron. Reliab., 53 (1): 17-29 (2013)