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Processing assessment and adhesion evaluation of copper through-silicon vias (TSVs) for three-dimensional stacked-integrated circuit (3D-SIC) architectures., , , , , , , , and . Microelectron. Reliab., 50 (9-11): 1636-1640 (2010)Design Issues and Considerations for Low-Cost 3-D TSV IC Technology., , , , , , , , , and 27 other author(s). IEEE J. Solid State Circuits, 46 (1): 293-307 (2011)TSV metrology and inspection challenges., , , , , , , , , and 6 other author(s). 3DIC, page 1-4. IEEE, (2009)Thin-Film Quantum Dot Photodiode for Monolithic Infrared Image Sensors., , , , , , , , , and . Sensors, 17 (12): 2867 (2017)3D Stacked IC demonstrator using Hybrid Collective Die-to-Wafer bonding with copper Through Silicon Vias (TSV)., , , , , , , , , and 3 other author(s). 3DIC, page 1-5. IEEE, (2009)Design issues and considerations for low-cost 3D TSV IC technology., , , , , , , , , and 24 other author(s). ISSCC, page 148-149. IEEE, (2010)