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A study on young's modulus of electroplated gold cantilevers for MEMS devices., , , , , , , , and . NEMS, page 264-267. IEEE, (2017)A distributed monitoring system with global network and Web technology., , and . ICWI, page 1175-1178. IADIS, (2004)A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology., , , , , , and . IEEE SENSORS, page 1-3. IEEE, (2016)Extensive Sensitivity Enhancement in Stacked Capacitive Tactile Sensors., , , , and . IEEE SENSORS, page 1-4. IEEE, (2019)Mobile Phone-Enhanced User Interface of Remote Monitoring System., , , , , and . ICMB, page 63-68. IEEE Computer Society, (2005)A Distributed Monitoring System Utilizing Cellular Phone as GUI., , , , , , and . ICETE (3), page 203-208. INSTICC Press, (2004)A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology., , , , , , and . NEMS, page 419-422. IEEE, (2016)Evaluation and modeling of adhesion layer in shock-protection structure for MEMS accelerometer., , , , , , and . Microelectron. Reliab., (2016)Development of high sensitivity CMOS-MEMS inertia sensor and its application to early-stage diagnosis of Parkinson's disease., , , , and . ESSCIRC, page 99-104. IEEE, (2016)High-Sensitivity Inertial Sensor Module to Measure Hidden Micro Muscular Sounds., , , , , , , , , and 2 other author(s). BioCAS, page 1-4. IEEE, (2019)