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MEMS Conveyance System for Pneumatic Two-dimensional Manipulation Based on Autonomous Distributed Systems.

, , , , and . ICRA, page 878-883. IEEE, (2004)

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FPGA-Based Decentralized Control of Arrayed MEMS for Microrobotic Application., , , , and . IEEE Trans. Ind. Electron., 54 (4): 1926-1936 (2007)A study on process-compatibility in CMOS-first MEMS-last integration., , , , , , and . CICC, page 85-88. IEEE, (2008)Contact Less Radio-frequencies Biosensor for Biological Parameters Analysis., , , , and . BIODEVICES, page 398-401. INSTICC Press, (2009)Sparse Random Signals for Fast Convergence on Invertible Logic., , , , , , and . IEEE Access, (2021)A Design Framework for Invertible Logic., , , , , , , and . IEEE Trans. Comput. Aided Des. Integr. Circuits Syst., 40 (4): 655-665 (2021)Servo Controller For Electrostatic Micro-actuators., , , and . IROS, page 21-26. IEEE, (1988)An Integrated Micro Servosystem., , and . IROS, page 15-20. IEEE, (1988)A MEMS-based interactive laser scanning display with a collocated laser range finder., , and . IEICE Electron. Express, 12 (10): 20150072 (2015)Biomotor-based nanotransport system constructed by pick-and-place assembly of individual molecules., , , , and . IROS, page 5628-5633. IEEE, (2010)Group work of distributed microactuators., , and . Robotica, 14 (5): 487-492 (1996)