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A study on process-compatibility in CMOS-first MEMS-last integration., , , , , , и . CICC, стр. 85-88. IEEE, (2008)A MEMS-based interactive laser scanning display with a collocated laser range finder., , и . IEICE Electron. Express, 12 (10): 20150072 (2015)Servo Controller For Electrostatic Micro-actuators., , , и . IROS, стр. 21-26. IEEE, (1988)An Integrated Micro Servosystem., , и . IROS, стр. 15-20. IEEE, (1988)Contact Less Radio-frequencies Biosensor for Biological Parameters Analysis., , , , и . BIODEVICES, стр. 398-401. INSTICC Press, (2009)Biomotor-based nanotransport system constructed by pick-and-place assembly of individual molecules., , , , и . IROS, стр. 5628-5633. IEEE, (2010)Two-dimensional conveyance system using cooperative motions of many microactuators., и . IROS, стр. 988-992. IEEE, (1996)Design of an Energy-Efficient True Random Number Generator Based on Triple Read-Write Data-Stream Multiplexing of MTJ Devices., , , , и . NEWCAS, стр. 283-286. IEEE, (2020)High-Throughput/Low-Energy MTJ-Based True Random Number Generator Using a Multi-Voltage/Current Converter., , , , , и . IEEE Trans. Very Large Scale Integr. Syst., 28 (10): 2171-2181 (2020)Self-assembly technique for MEMS vertical comb electrostatic actuator., , , , , и . IEICE Electron. Express, 2 (9): 311-315 (2005)