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1D ResNet for Fault Detection and Classification on Sensor Data in Semiconductor Manufacturing.

, , , , , and . ICCAD, page 1-6. IEEE, (2022)

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A Comparative Evaluation of Deep Learning Anomaly Detection Techniques on Semiconductor Multivariate Time Series Data., , , and . CASE, page 1613-1620. IEEE, (2021)Finite Memory Observers for linear time-varying systems. Part II: Observer and residual sensitivity., , and . J. Frankl. Inst., 351 (5): 2860-2889 (2014)Detection & isolation of sensor and actuator additive faults in a 4-mecanum wheeled mobile robot (4-MWMR)., , , , and . ICCAD, page 1-6. IEEE, (2019)1D ResNet for Fault Detection and Classification on Sensor Data in Semiconductor Manufacturing., , , , , and . ICCAD, page 1-6. IEEE, (2022)On fault detection and isolation applied on unicycle mobile robot sensors and actuators., , , , and . ICSC, page 148-153. IEEE, (2018)Monitoring of a sampled process data under Run-to-Run control: application to a semiconductor process., , , , and . CASE, page 930-935. IEEE, (2019)Finite Memory Observers for linear time-varying systems: Theory and diagnosis applications., , and . J. Frankl. Inst., 351 (2): 785-810 (2014)Run To Run control based on categorical output in semiconductor manufacturing., , , and . ICSC, page 180-185. IEEE, (2016)Actuator Health State Monitoring & Degradation Impact Study on a 4-Mecanum Wheeled Mobile Robot Behaviour., , , , and . MED, page 1076-1081. IEEE, (2021)Health State Monitoring of 4-mecanum Wheeled Mobile Robot Actuators and its Impact on the Robot Behavior Analysis., , , , and . J. Intell. Robotic Syst., 102 (4): 86 (2021)