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1D ResNet for Fault Detection and Classification on Sensor Data in Semiconductor Manufacturing.

, , , , , and . ICCAD, page 1-6. IEEE, (2022)

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Fault tolerant control for switching discrete-time systems with delays: an improved cone complementarity approach., , and . Int. J. Systems Science, 45 (10): 2116-2126 (2014)Fault Detection for Switching Discrete-Time Systems with External Disturbance., , and . CSSP, 34 (7): 2127-2140 (2015)Evaluation of Alarm System Performance and Management in Semiconductor Manufacturing., , , , and . CoDIT, page 1155-1160. IEEE, (2019)Improving the GRLVQ Algorithm by the Cross Entropy Method., , and . ICANN (1), volume 4668 of Lecture Notes in Computer Science, page 199-208. Springer, (2007)Development of flying qualities based charts as a support for the initialization of the gains of helicopter control laws., , , and . CCA, page 445-450. IEEE, (2014)Modeling and nonlinear control of magnetic levitation systems., and . IEEE Trans. Ind. Electron., 48 (4): 831-838 (2001)Computationally Efficient Algorithm for Atrial Fibrillation Detection using Linear and Geometric Features of RR Time-Series Derivatives., , and . ICCAD, page 1-6. IEEE, (2022)From Alarm System Events Towards Quality Inspection of The Final Product: Application to a Semiconductor Industry., , , , and . ECC, page 1768-1773. IEEE, (2021)Application of Principal Components Analysis to improve fault detection and diagnosis on semiconductor manufacturing equipment., , and . ECC, page 1445-1450. IEEE, (2013)A Comparative Evaluation of Deep Learning Anomaly Detection Techniques on Semiconductor Multivariate Time Series Data., , , and . CASE, page 1613-1620. IEEE, (2021)