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Assessment of dielectric charging in electrostatically driven MEMS devices: A comparison of available characterization techniques.

, , , , , , и . Microelectron. Reliab., 50 (9-11): 1615-1620 (2010)

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Christoforos Papaioannou

Ioannis Papaioannou

Iason Papaioannou

Johannes Papaioannou

Dimitris Papaioannou

 

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