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Kelvin probe microscopy for reliability investigation of RF-MEMS capacitive switches.

, , , , , , , and . Microelectron. Reliab., 48 (8-9): 1232-1236 (2008)

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Kelvin probe microscopy for reliability investigation of RF-MEMS capacitive switches., , , , , , , and . Microelectron. Reliab., 48 (8-9): 1232-1236 (2008)Structure dependent charging process in RF MEMS capacitive switches., , , , , and . Microelectron. Reliab., 47 (9-11): 1812-1817 (2007)Voltage and temperature effect on dielectric charging for RF-MEMS capacitive switches reliability investigation., , , , , , , , and . Microelectron. Reliab., 48 (8-9): 1248-1252 (2008)Développement d'outils d'analyse des matériaux pour l'étude du chargement des diélectriques: application à la fiabilité des micro-commutateurs RF à actionnement éléctrostatique.. Paul Sabatier University, Toulouse, France, (2008)Charging-Effects in RF capacitive switches influence of insulating layers composition., , , , , , and . Microelectron. Reliab., 46 (9-11): 1700-1704 (2006)Alpha particle radiation effects in RF MEMS capacitive switches., , , , , , , and . Microelectron. Reliab., 48 (8-9): 1241-1244 (2008)Charging of radiation induced defects in RF MEMS dielectric films., , , , , and . Microelectron. Reliab., 46 (9-11): 1695-1699 (2006)