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Critical reliability challenges in scaling SiO2-based dielectric to its limit., , , , , and . Microelectron. Reliab., 43 (8): 1175-1184 (2003)A Retrospective View on the Technology Evolution to Support Low Power Mobile Application., , , , , , and . J. Low Power Electron., 14 (3): 374-392 (2018)Practical performance/power alternatives within an existing CMOS technology generation., , , , , and . ISLPED, page 365-370. IEEE, (1996)Effective Drive Current in Scaled FinFET and NSFET CMOS Inverters., , , , , , , , and . DRC, page 1-2. IEEE, (2018)High Performance Double-Gate Device Technology Challenges and Opportunities (invited)., , , , and . ISQED, page 492-495. IEEE Computer Society, (2002)Compact modeling and simulation of PD-SOI MOSFETs: Current status and challenges., , , , , and . CICC, page 265-272. IEEE, (2008)Overview of gate linewidth control in the manufacture of CMOS logic chips., , , , , , , , , and 1 other author(s). IBM J. Res. Dev., 39 (1-2): 189-200 (1995)CMOS scaling into the 21st century: 0.1 µm and beyond., , , , , , , , and . IBM J. Res. Dev., 39 (1-2): 245-260 (1995)Reduced-voltage power/performance optimization of the 3.6-volt PowerPC 601 Microprocessor., , , , and . IBM J. Res. Dev., 39 (1-2): 33-42 (1995)Silicon CMOS devices beyond scaling., , , , , , , , , and . IBM J. Res. Dev., 50 (4-5): 339-362 (2006)