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An analysis of tool capabilities in the photolithography area of an ASIC fab.

, , и . WSC, стр. 1761-1767. WSC, (2007)

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Joseph Kabak

Omar Kamil

Hüseyin Halit Erkan

Gerhard Kabaker

Kemal Kabakci

 

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An analysis of tool capabilities in the photolithography area of an ASIC fab., , и . WSC, стр. 1761-1767. WSC, (2007)Single toolset modeling approaches in semiconductor manufacturing., , и . WSC, стр. 203:1-203:11. WSC, (2012)Capacity modelling of a wet bench cluster tool with material handling robot., , и . Int. J. Computer Integrated Manufacturing, 25 (11): 1029-1046 (2012)An improved metric for measuring multi-item multi-level schedule instability under rolling schedules., и . Comput. Ind. Eng., 56 (2): 691-707 (2009)Demonstration of the Feasibility of Real Time Application of Machine Learning to Production Scheduling., , и . WSC, стр. 3406-3417. IEEE, (2022)Performance improvement for a wet bench tool., , и . WSC, стр. 2586-2593. IEEE, (2010)Generating operating curves in complex systems using machine learning., , и . WSC, стр. 2404-2413. IEEE/ACM, (2014)Flexibility as an Enabler for carbon dioxide Reduction in a Global supply Chain: a Case Study from the semiconductor Industry., , , , и . WSC, стр. 3408-3419. IEEE, (2018)Deep Learning Enabling Digital Twin Applications in Production Scheduling: Case of Flexible Job Shop Manufacturing Environment., , , , и . WSC, стр. 2148-2159. IEEE, (2023)Implementing a New Genetic Algorithm to solve the Capacity Allocation Problem in the photolithography Area., , и . WSC, стр. 3696-3707. IEEE, (2018)